发明申请
US20060004289A1 High sensitivity capacitive micromachined ultrasound transducer 审中-公开
高灵敏度电容微机械超声换能器

High sensitivity capacitive micromachined ultrasound transducer
摘要:
A capacitive micromachined ultrasound transducer (cMUT) comprises a lower electrode. Furthermore, the cMUT includes a diaphragm disposed adjacent to the lower electrode such that a gap having a first gap width is formed between the diaphragm and the lower electrode. Additionally, the cMUT includes at least one element formed in the gap, where the at least one element is arranged to provide a second gap width between the diaphragm and the lower electrode.
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