发明申请
US20060004289A1 High sensitivity capacitive micromachined ultrasound transducer
审中-公开
高灵敏度电容微机械超声换能器
- 专利标题: High sensitivity capacitive micromachined ultrasound transducer
- 专利标题(中): 高灵敏度电容微机械超声换能器
-
申请号: US10881924申请日: 2004-06-30
-
公开(公告)号: US20060004289A1公开(公告)日: 2006-01-05
- 发明人: Wei-Cheng Tian , Warren Lee , Lowell Smith , Ye-Ming Li , Jie Sun
- 申请人: Wei-Cheng Tian , Warren Lee , Lowell Smith , Ye-Ming Li , Jie Sun
- 主分类号: A61B8/14
- IPC分类号: A61B8/14
摘要:
A capacitive micromachined ultrasound transducer (cMUT) comprises a lower electrode. Furthermore, the cMUT includes a diaphragm disposed adjacent to the lower electrode such that a gap having a first gap width is formed between the diaphragm and the lower electrode. Additionally, the cMUT includes at least one element formed in the gap, where the at least one element is arranged to provide a second gap width between the diaphragm and the lower electrode.
信息查询