发明申请
US20060005657A1 Method and system to control movement of a body for nano-scale manufacturing 审中-公开
用于控制身体运动的方法和系统用于纳米级制造

Method and system to control movement of a body for nano-scale manufacturing
摘要:
The present invention is directed towards a method and system of controlling movement of a body coupled to an actuation system that features translating movement of the body in a plane extending by imparting angular motion in the actuation system with respect to two spaced-apart axes. Specifically, rotational motion is generated in two spaced-apart planes, one of which extends parallel to the plane in which the body translates. This facilitates proper orientation of the body with respect to a surface spaced-apart therefrom.
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