发明申请
- 专利标题： Apparatus and method for cleaning glass substrates using a cool hydrogen flame
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申请号： US10495973申请日： 2002-11-20
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公开(公告)号： US20060005857A1公开(公告)日： 2006-01-12
- 发明人: David Liang , Tuti Lim , Sau Ngen Chen
- 申请人： David Liang , Tuti Lim , Sau Ngen Chen
- 优先权： SG2001072206 20011121
- 国际申请： PCT/SG02/00271 WO 20021120
- 主分类号： C03C23/00
- IPC分类号： C03C23/00
摘要：
Contaminants from surfaces of temperature sensitive substrates, such as glass substrates are removed by exposing the surfaces to a hydrogen Surface-mixed diffusion flame for a predetermined duration of time. The predetermined duration of time being insufficient to heat up the surfaces substantially thereby causing damage to the temperature sensitive substrates.