发明申请
US20060011247A1 Modular substrate gas panel having manifold connections in a common plane
有权
模块化衬底气体面板在共同平面内具有歧管连接
- 专利标题： Modular substrate gas panel having manifold connections in a common plane
- 专利标题（中）： 模块化衬底气体面板在共同平面内具有歧管连接
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申请号： US11232031申请日： 2005-09-21
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公开(公告)号： US20060011247A1公开(公告)日： 2006-01-19
- 发明人: Kim Vu
- 申请人： Kim Vu
- 申请人地址： US TX Austin
- 专利权人： Celerity, Inc.
- 当前专利权人： Celerity, Inc.
- 当前专利权人地址： US TX Austin
- 主分类号： F17D1/00
- IPC分类号： F17D1/00
摘要：
A gas panel comprising a first gas stick, a second gas stick, and a first manifold. The first gas stick has a first flow path that includes a first plurality of ports formed in a common plane, and the second gas stick has a second flow path that includes a second plurality of ports formed in the common plane. The first manifold has first and second ports formed in the common plane, the first port being fluidly connected to one port of the first plurality of ports of the first gas stick, and the second port being fluidly connected to one port of the second plurality of ports of the second gas stick. A thermally and vibrationally insulating mounting assembly may be used to mount the first and second gas sticks to a mounting plate.
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