发明申请
US20060012871A1 Light scanning electron microscope and use 有权
光扫描电子显微镜和使用

Light scanning electron microscope and use
摘要:
In a confocal laser scanning microscope with an illuminating configuration (2), which provides an illuminating beam for illuminating a probe region (23), with a scanning configuration (3, 4), which guides the illuminating beam over the probe while scanning, and with a detector configuration (5), which via the scanning configuration (3, 4) images the illuminated probe region (23) by means of a confocal aperture (26) on to at least one detector unit (28), it is provided that the illuminating configuration (2) of the scanning configuration (3, 4) provides a line-shaped illuminating beam, that the scanning configuration (3, 4) guides the line-shaped illuminating beam over the probe f while scanning and that the confocal aperture is designed as a slotted aperture (26) or as a slot-shaped region (28, 48) of the detector unit (28) acting as a confocal aperture.
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