发明申请
- 专利标题: Light scanning electron microscope and use
- 专利标题(中): 光扫描电子显微镜和使用
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申请号: US10967638申请日: 2004-10-19
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公开(公告)号: US20060012871A1公开(公告)日: 2006-01-19
- 发明人: Joerg-Michael Funk , Ralf Wolleschensky , Joerg Steinert
- 申请人: Joerg-Michael Funk , Ralf Wolleschensky , Joerg Steinert
- 优先权: DE102004034970.3 20040716
- 主分类号: G02B21/06
- IPC分类号: G02B21/06
摘要:
In a confocal laser scanning microscope with an illuminating configuration (2), which provides an illuminating beam for illuminating a probe region (23), with a scanning configuration (3, 4), which guides the illuminating beam over the probe while scanning, and with a detector configuration (5), which via the scanning configuration (3, 4) images the illuminated probe region (23) by means of a confocal aperture (26) on to at least one detector unit (28), it is provided that the illuminating configuration (2) of the scanning configuration (3, 4) provides a line-shaped illuminating beam, that the scanning configuration (3, 4) guides the line-shaped illuminating beam over the probe f while scanning and that the confocal aperture is designed as a slotted aperture (26) or as a slot-shaped region (28, 48) of the detector unit (28) acting as a confocal aperture.
公开/授权文献
- US07561326B2 Light scanning microscope and use 公开/授权日:2009-07-14
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