A linear scale attachment device for holding and securely attaching a linear scale on an object to be measured is disclosed. The device includes an aluminum base formed with a holding groove having a larger opening than the width of a linear scale that is fitted in this groove, and a retainer for preventing the linear scale fitted in the holding groove from falling off. The base is permanently attached to the object at one location in the lengthwise direction, and resiliently attached at one or more other locations such as to be pressed in the X and Y directions using a cantilever plate spring. While using an aluminum base, the attachment device allows easy attachment and maintenance of the scale and relieves the effect of thermal stress caused by a difference in the thermal expansion coefficient between the aluminum base and the object.