发明申请
US20060017933A1 Heterodyne laser interferometer with porro prisms for measuring stage displacement
审中-公开
Heterodyne激光干涉仪与porro棱镜测量级位移
- 专利标题： Heterodyne laser interferometer with porro prisms for measuring stage displacement
- 专利标题（中）： Heterodyne激光干涉仪与porro棱镜测量级位移
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申请号： US10897467申请日： 2004-07-23
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公开(公告)号： US20060017933A1公开(公告)日： 2006-01-26
- 发明人: W. Schluchter , L. Lee
- 申请人： W. Schluchter , L. Lee
- 主分类号： G01B9/02
- IPC分类号： G01B9/02
摘要：
An interferometer system for measuring a displacement along a first direction includes (1) a measurement roof optic (e.g., a porro prism) mounted to a stage translatable along the first direction, (2) a polarizing beam splitter having (a) a first face opposite the measurement roof optic and (b) a second face opposite the first face, (3) a first wave plate located between the measurement roof optic and the first face of the polarizing beam splitter, and (4) a redirecting optic located opposite the first face of the polarizing beam splitter. A measurement path through the system includes only segments located substantially in a plane defined by the first direction and a second direction orthogonal to the first direction.
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