发明申请
- 专利标题: Methods and configurations for manufacturing hinges for micro-mirror devices
- 专利标题(中): 用于制造微镜装置铰链的方法和结构
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申请号: US11187248申请日: 2005-07-23
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公开(公告)号: US20060018005A1公开(公告)日: 2006-01-26
- 发明人: Fusao Ishii
- 申请人: Fusao Ishii
- 专利权人: Silicon Quest Kabushiki-Kaisha
- 当前专利权人: Silicon Quest Kabushiki-Kaisha
- 主分类号: G02B26/00
- IPC分类号: G02B26/00
摘要:
An image display system includes an improved hinge for a micro-mirror device composed of a conductive doped semiconductor and immune to plastic deformation at typical to extreme temperatures. The hinge is directly connected to the micro-mirror device and facilitates the manufacturing of an optically flat micro-mirror. This eliminates Fraunhofer diffraction due to recesses on the reflective surface of the micro-mirror. In addition, the hinge is hidden from incoming light thus improving contrast and fill-factor. The image display system further includes signal transmission metal traces formed on areas between the doped semiconductor hinges. The signal transmission metal traces are formed either before or after a high temperature crystallization process is applied to the hinges.
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