发明申请
- 专利标题: Illumination optical system, illumination apparatus using the illumination optical system, and observation system provided with the illumination optical system or the illumination apparatus
- 专利标题(中): 照明光学系统,使用该照明光学系统的照明装置,以及设置有照明光学系统或照明装置的观察系统
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申请号: US11181816申请日: 2005-07-15
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公开(公告)号: US20060018031A1公开(公告)日: 2006-01-26
- 发明人: Yoshiharu Takasugi
- 申请人: Yoshiharu Takasugi
- 优先权: JP2004-216035 20040723
- 主分类号: G02B21/02
- IPC分类号: G02B21/02
摘要:
An illumination optical system disposed in order to diffuse illumination light emitted from a light source, includes at least one optical device having a roughened optical surface, with the arithmetic average roughness of the roughened surface set in a range of 0.05 to 0.75 [μm].
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