发明申请
US20060018031A1 Illumination optical system, illumination apparatus using the illumination optical system, and observation system provided with the illumination optical system or the illumination apparatus 有权
照明光学系统,使用该照明光学系统的照明装置,以及设置有照明光学系统或照明装置的观察系统

  • 专利标题: Illumination optical system, illumination apparatus using the illumination optical system, and observation system provided with the illumination optical system or the illumination apparatus
  • 专利标题(中): 照明光学系统,使用该照明光学系统的照明装置,以及设置有照明光学系统或照明装置的观察系统
  • 申请号: US11181816
    申请日: 2005-07-15
  • 公开(公告)号: US20060018031A1
    公开(公告)日: 2006-01-26
  • 发明人: Yoshiharu Takasugi
  • 申请人: Yoshiharu Takasugi
  • 优先权: JP2004-216035 20040723
  • 主分类号: G02B21/02
  • IPC分类号: G02B21/02
Illumination optical system, illumination apparatus using the illumination optical system, and observation system provided with the illumination optical system or the illumination apparatus
摘要:
An illumination optical system disposed in order to diffuse illumination light emitted from a light source, includes at least one optical device having a roughened optical surface, with the arithmetic average roughness of the roughened surface set in a range of 0.05 to 0.75 [μm].
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