发明申请
- 专利标题: Electrostatic holding device and electrostatic tweezers using the same
- 专利标题(中): 静电保持装置和使用其的静电镊子
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申请号: US10529382申请日: 2003-09-25
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公开(公告)号: US20060023393A1公开(公告)日: 2006-02-02
- 发明人: Fow-Lai Poh
- 申请人: Fow-Lai Poh
- 申请人地址: JP Mooka-shi 321-4346
- 专利权人: TSUKUBA SEIKO LTD.
- 当前专利权人: TSUKUBA SEIKO LTD.
- 当前专利权人地址: JP Mooka-shi 321-4346
- 优先权: JP2002-282483 20020927; JP2003-131016 20030509
- 国际申请: PCT/JP03/12225 WO 20030925
- 主分类号: H01T23/00
- IPC分类号: H01T23/00
摘要:
An electrostatic holding device (100) in which an electrode group (103) having a plurality of electrodes covered with an insulating material (102) is used as a holding surface applies predetermined voltage to the electrode group (103) to hold a holding object (104) by an electrostatic force with a contact state or with a floating non-contact state. The electrostatic holding includes an internal polarization eliminating device (applied voltage control portion 105) to eliminate the internal polarization generating in the insulating material (102) by switching the polarity of voltage to be applied to the electrode group (103). There are provided with the electrostatic holding device in which the electrostatic attraction does not deteriorate by usability, and electrostatic tweezers in which the electrostatic attraction does not deteriorate when the tweezers are manually used.
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