发明申请
US20060023932A1 SYSTEM AND METHOD FOR GENERATING A SET OF TEST PATTERNS FOR AN OPTICAL PROXIMITY CORRECTION ALGORITHM
有权
用于生成一组用于光临近度校正算法的测试模式的系统和方法
- 专利标题： SYSTEM AND METHOD FOR GENERATING A SET OF TEST PATTERNS FOR AN OPTICAL PROXIMITY CORRECTION ALGORITHM
- 专利标题（中）： 用于生成一组用于光临近度校正算法的测试模式的系统和方法
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申请号： US10710648申请日： 2004-07-27
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公开(公告)号： US20060023932A1公开(公告)日： 2006-02-02
- 发明人: David DeMaris , Mark Lavin , William Leipold , Daniel Maynard , Maharaj Mukherjee
- 申请人： David DeMaris , Mark Lavin , William Leipold , Daniel Maynard , Maharaj Mukherjee
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 主分类号： G06K9/00
- IPC分类号： G06K9/00 ; G06F17/50
摘要：
A system and method of synthesizing layout patterns to test an optical proximity correction algorithm. The method comprises the steps of: embodying Walsh patterns in a set of Walsh pattern matrices; processing groups of matrices from the set of Walsh pattern matrices to form a set of test matrices; mapping the set of test matrices to a test pattern set.
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