发明申请
- 专利标题: Semiconductor device and method of manufacturing the same
- 专利标题(中): 半导体装置及其制造方法
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申请号: US11194545申请日: 2005-08-02
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公开(公告)号: US20060033149A1公开(公告)日: 2006-02-16
- 发明人: Mu-Yi Liu , Tao-Cheng Lu
- 申请人: Mu-Yi Liu , Tao-Cheng Lu
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
An EEPROM cell includes first and second assist gates on opposite sides of a charge retaining insulating layer. Current in the EEPROM memory cell flows between inversion layers, which are created in response to a bias applied to the assist gates. The insulating layer can include silicon nitride, which is provided between layers of silicon dioxide above the channel region, such that these layers can constitute a dielectric stack, which can be fabricated to occupy a relatively small area.
公开/授权文献
- US07348625B2 Semiconductor device and method of manufacturing the same 公开/授权日:2008-03-25
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