发明申请
- 专利标题: Photoresist stripping solution and a method of stripping photoresists using the same
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申请号: US11246297申请日: 2005-10-11
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公开(公告)号: US20060035176A1公开(公告)日: 2006-02-16
- 发明人: Shigeru Yokoi , Kazumasa Wakiya
- 申请人: Shigeru Yokoi , Kazumasa Wakiya
- 优先权: JP2001-264294 20010831
- 主分类号: G03F7/32
- IPC分类号: G03F7/32
摘要:
A photoresist stripping solution comprising (a) a carboxyl group-containing acidic compound, (b) at least one basic compound (for example, monoethanolamine, tetraalkylammonium) selected from among alkanolamines and specific quaternary ammonium hydroxides, (c) a sulfur-containing corrosion inhibitor and (d) water, and having a pH value of 3.5-5.5; and a method of stripping photoresists using the same are disclosed. The present invention provides a photoresist stripping solution which is excellent in the effect of protecting metal wirings (in particular, Cu wirings) from corrosion, never damages interlevel films, such as low dielectric layers or organic SOG layers, and shows excellent strippability of photoresist films and post-ashing residues.
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