• 专利标题: Photoresist stripping solution and a method of stripping photoresists using the same
  • 申请号: US11246297
    申请日: 2005-10-11
  • 公开(公告)号: US20060035176A1
    公开(公告)日: 2006-02-16
  • 发明人: Shigeru YokoiKazumasa Wakiya
  • 申请人: Shigeru YokoiKazumasa Wakiya
  • 优先权: JP2001-264294 20010831
  • 主分类号: G03F7/32
  • IPC分类号: G03F7/32
Photoresist stripping solution and a method of stripping photoresists using the same
摘要:
A photoresist stripping solution comprising (a) a carboxyl group-containing acidic compound, (b) at least one basic compound (for example, monoethanolamine, tetraalkylammonium) selected from among alkanolamines and specific quaternary ammonium hydroxides, (c) a sulfur-containing corrosion inhibitor and (d) water, and having a pH value of 3.5-5.5; and a method of stripping photoresists using the same are disclosed. The present invention provides a photoresist stripping solution which is excellent in the effect of protecting metal wirings (in particular, Cu wirings) from corrosion, never damages interlevel films, such as low dielectric layers or organic SOG layers, and shows excellent strippability of photoresist films and post-ashing residues.
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