发明申请
- 专利标题: METHODS FOR THE DETERMINATION OF FILM CONTINUITY AND GROWTH MODES IN THIN DIELECTRIC FILMS
- 专利标题(中): 薄膜电泳膜中膜连续性和生长模式的测定方法
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申请号: US10710947申请日: 2004-08-13
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公开(公告)号: US20060035393A1公开(公告)日: 2006-02-16
- 发明人: Michael Chudzik , Joseph Shepard
- 申请人: Michael Chudzik , Joseph Shepard
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L21/66
- IPC分类号: H01L21/66
摘要:
The invention provides methods for determining film continuity and growth modes in thin dielectric films. The continuity determining method comprises: depositing a material on the substrate using a first value of a growth metric; depositing an amount of charge on a surface of the material; repetitively measuring a surface voltage of the material until an onset of tunneling to provide a Vtunnel (or Etunnel) value; repeating the above steps for different values of the growth metric; and comparing the Vtunnel (or Etunnel) values for different values of the growth metric to provide a measure of the continuity of the material on the substrate. The growth modes of the material can be determined by comparing the first derivative of the Vtunnel or Etunnel per growth metric curve versus the growth metric, and examining the linearity of the results of the comparison.