发明申请
- 专利标题: Transistors having reinforcement layer patterns and methods of forming the same
- 专利标题(中): 具有加强层图案的晶体管及其形成方法
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申请号: US11204564申请日: 2005-08-15
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公开(公告)号: US20060038200A1公开(公告)日: 2006-02-23
- 发明人: Ho Lee , Dong-Suk Shin , Hwa-Sung Rhee , Ueno Tetsuji , Seung-Hwan Lee
- 申请人: Ho Lee , Dong-Suk Shin , Hwa-Sung Rhee , Ueno Tetsuji , Seung-Hwan Lee
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 优先权: KR10-2004-0066077 20040820
- 主分类号: H01L31/0328
- IPC分类号: H01L31/0328 ; H01L21/336
摘要:
According to some embodiments of the invention, there is provided line photo masks that includes transistors having reinforcement layer patterns and methods of forming the same. The transistors and the methods provide a way of compensating a partially removed amount of a strained silicon layer during semiconductor fabrication processes. To the end, at least one gate pattern is disposed on an active region of a semiconductor substrate. Reinforcement layer patterns are formed to extend respectively from sidewalls of the gate pattern and disposed on a main surface of the semiconductor substrate. Each reinforcement layer pattern partially exposes each sidewall of the gate pattern. Impurity regions are disposed in the reinforcement layer patterns and the active region of the semiconductor substrate and overlap the gate pattern. Spacer patterns are disposed on the reinforcement layer patterns and partially cover the sidewalls of the gate pattern.
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