发明申请
US20060043507A1 Bulk acoustic wave resonator with means for suppression of pass-band ripple in bulk acoustic wave filters
审中-公开
具有用于抑制体声波滤波器中通带纹波的装置的体声波谐振器
- 专利标题： Bulk acoustic wave resonator with means for suppression of pass-band ripple in bulk acoustic wave filters
- 专利标题（中）： 具有用于抑制体声波滤波器中通带纹波的装置的体声波谐振器
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申请号： US10527115申请日： 2003-09-01
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公开(公告)号： US20060043507A1公开(公告)日： 2006-03-02
- 发明人: Hans Lobl , Robert Milsom , Christof Metzmacher , Hans-Wolfgang Brand , Mareike Klee , Rainer Kiewitt
- 申请人： Hans Lobl , Robert Milsom , Christof Metzmacher , Hans-Wolfgang Brand , Mareike Klee , Rainer Kiewitt
- 优先权： EP02256348.0 20020912
- 国际申请： PCT/IB03/03993 WO 20030901
- 主分类号： H01L29/84
- IPC分类号： H01L29/84
摘要：
A bulk acoustic wave resonator comprising a substrate (5), a Bragg reflector (4), a top (1) and a bottom (3) electrode and a piezoelectric layer (2) with means for suppression of the pass-band ripples in a bulk acoustic wave filter. The means for absorbing or scattering the spurious modes are a roughened rear side of the substrate (6), an absorbing layer (5) disposed on the rear side of the substrate (6) and/or an absorbing layer (5) disposed on the front side of the substrate.
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