发明申请
- 专利标题： Physical quantity sensor and method for manufacturing the same
- 专利标题（中）： 物理量传感器及其制造方法
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申请号： US11220543申请日： 2005-09-08
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公开(公告)号： US20060048572A1公开(公告)日： 2006-03-09
- 发明人: Toshiki Isogai , Masato Ishihara , Michitaka Hayashi , Toshikazu Itakura
- 申请人： Toshiki Isogai , Masato Ishihara , Michitaka Hayashi , Toshikazu Itakura
- 专利权人： NIPPON SOKEN, INC.,DENSO CORPORATION
- 当前专利权人： NIPPON SOKEN, INC.,DENSO CORPORATION
- 优先权： JP2004-267205 20040914; JP2004-267204 20040914; JP2004-284410 20040929; JP2004-261423 20040908
- 主分类号： G01N27/22
- IPC分类号： G01N27/22 ; H01L21/4763
摘要：
A capacitance type humidity sensor includes: a detection substrate including a detection portion on a first side of the detection substrate; and a circuit board including a circuit portion. The detection portion detects humidity on the basis of capacitance change of the detection portion. The circuit portion processes the capacitance change as an electric signal. The detection substrate further includes a sensor pad on a second side of the detection substrate. The sensor pad is electrically connected to the detection portion through a conductor in a through hole of the detection substrate.
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