发明申请
- 专利标题： Metal surface protective film forming agent and use thereof
- 专利标题（中）： 金属表面保护膜成型剂及其用途
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申请号： US10764559申请日： 2004-01-27
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公开(公告)号： US20060049382A1公开(公告)日： 2006-03-09
- 发明人: Kiyonori Furuta , Masahiko Kurauchi , Hiroyuki Sato
- 申请人： Kiyonori Furuta , Masahiko Kurauchi , Hiroyuki Sato
- 申请人地址： JP Tokyo
- 专利权人： Ajinomoto Co., Inc.
- 当前专利权人： Ajinomoto Co., Inc.
- 当前专利权人地址： JP Tokyo
- 优先权： JP2001-227610 20010727
- 主分类号： C23F11/00
- IPC分类号： C23F11/00 ; C09K3/00
摘要：
The present invention provides a metal surface protective film-forming agent that contains an α-amino acid (e.g., leucine, phenylalanine and valine) and a metal polishing solution using the same. The present invention also provides a method of polishing a surface of a base material for the manufacture of a substrate for semiconductor circuits, a method of forming a metal surface protective film, the use of the particular amino acid to the metal surface protective film forming agent, a substrate for semiconductor circuit that uses the same, a semiconductor circuit including these and a method of manufacturing the same.
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