发明申请
- 专利标题: Bump structure
- 专利标题(中): 凹凸结构
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申请号: US10938594申请日: 2004-09-13
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公开(公告)号: US20060055035A1公开(公告)日: 2006-03-16
- 发明人: Tzu-Han Lin , Huei-Mei Yu , Chia-Jen Cheng , Chun-Yen Lo , Li-Hsin Tseng , Boe Su , Simon Lu
- 申请人: Tzu-Han Lin , Huei-Mei Yu , Chia-Jen Cheng , Chun-Yen Lo , Li-Hsin Tseng , Boe Su , Simon Lu
- 主分类号: H01L23/48
- IPC分类号: H01L23/48
摘要:
Solder bump structures for semiconductor device packaging is provided. In one embodiment, a solder bump structure comprises a semiconductor substrate, the substrate has at least one contact pad and an upper passivation layer having at least one opening formed therein exposing a portion of the contact pad. At least one patterned and etched polymer layer is formed on a portion of the contact pad. At least one patterned and etched conductive metal layer is formed above the polymer layer and is aligned therewith. And at least one layer of solder material having a solder height is provided above the conductive metal layer, the layer of solder is aligned with the conductive metal layer, the layer of solder is thereafter reflown thereby creating a solder ball.
公开/授权文献
- US07187078B2 Bump structure 公开/授权日:2007-03-06
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