Invention Application
US20060056161A1 Flexible device, flexible pressure sensor, and fabrication method thereof 审中-公开
柔性装置,柔性压力传感器及其制造方法

Flexible device, flexible pressure sensor, and fabrication method thereof
Abstract:
A flexible device, a flexible pressure sensor, and a fabrication method thereof. The present flexible device includes: a first flexible substrate formed of a flexible material to have a flexibility; an active element formed to have a predetermined thickness and a flexibility, and being attached on the first flexible substrate; and a second flexible substrate formed of a flexible material to have a flexibility, and being deposited on the active element. The flexible device and the flexible pressure sensor have a high flexibility, so that they may be applied for a medical treatment such as implantation to a living body, a human body and so forth. In addition, the flexible device has a high flexibility, so that it may be inserted to a curved surface, which contributes to remove the limit of space where the semiconductor package device may be inserted.
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