Invention Application
- Patent Title: Coherence microscope
- Patent Title (中): 相干显微镜
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Application No.: US10538587Application Date: 2003-12-16
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Publication No.: US20060056784A1Publication Date: 2006-03-16
- Inventor: Christoph Hauger , Hans-Joachim Miesner , Ludwin Monz
- Applicant: Christoph Hauger , Hans-Joachim Miesner , Ludwin Monz
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss AG
- Current Assignee: Carl Zeiss AG
- Current Assignee Address: DE Oberkochen
- Priority: DE10260887.3 20021217
- International Application: PCT/EP03/14323 WO 20031216
- Main IPC: G02B6/04
- IPC: G02B6/04
![Coherence microscope](/abs-image/US/2006/03/16/US20060056784A1/abs.jpg.150x150.jpg)
Abstract:
A coherence microscope has a divider (3) that divides light emitted by a light source (1) into measurement light, which is supplied to and reflected by a specimen (13), and reference light. A superimposition device (25, 31) superimposes the measurement light reflected by the specimen (13) with the reference light. A short sensor array (41) detects the light resulting from the superimposition and permits a read-out rate of at least about 60 kHz. The superimposition device has an emission device (25, 31) for emitting the measurement light and the reference light arranged to effect extensive irradiation of the sensor array (41) with superimposed light. The ratio of distances covered by the measurement light and the reference light from the emission device (25, 31) to impingement points on the sensor array (41) varies in the portion of the sensor array (41) that is irradiated with superimposed light.
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