Invention Application
- Patent Title: Memory cell
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Application No.: US10945762Application Date: 2004-09-21
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Publication No.: US20060060909A1Publication Date: 2006-03-23
- Inventor: Min-Hwa Chi , Wen-Chuan Chiang , Cheng-Ku Chen
- Applicant: Min-Hwa Chi , Wen-Chuan Chiang , Cheng-Ku Chen
- Main IPC: H01L29/94
- IPC: H01L29/94

Abstract:
Disclosed herein is a DRAM memory cell featuring a reduced size, increased retention time, and compatibility with standard logic manufacturing processes, making it well-suited for use as embedded DRAM. The memory cell disclosed herein includes a pass-gate transistor and a storage region. The transistor includes a gate and a drain. The storage region includes a trench, which is preferably a Shallow Trench Isolation (STI). A non-insulating structure, e.g., formed of polysilicon or metal, is located in the trench as serves as a capacitor node. The trench is partially defined by a doped sidewall that serves as a source for the transistor. The poly structure and the trench sidewall are separated by a dielectric layer. The write operation involves charge transport to the non-insulating structure by direct tunneling through the dielectric layer. The read operation is assisted by Gate Induced Drain Leakage (GIDL) current generated on the surface of the sidewall.
Public/Granted literature
- US07633110B2 Memory cell Public/Granted day:2009-12-15
Information query
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