Invention Application
US20060061285A1 High power, long focus electron source for beam processing 有权
用于光束处理的大功率,长焦距电子源

High power, long focus electron source for beam processing
Abstract:
Beam processing methods including e-beam welding and e-beam evaporation for thin film deposition are implemented with a novel high power, long focus electron source. The high power, long focus electron source generates an e-beam. The e-beam is transported through a series of steering magnets to steer the beam. At least one refocusing magnet is provided to refocus the e-beam. A final steering magnet bends the e-beam to focus on a target, such as a weld joint or a deposition target.
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