发明申请
US20060062903A1 Process and apparatus for producing a substrate having a coating resin layer
审中-公开
具有涂布树脂层的基板的制造方法和装置
- 专利标题: Process and apparatus for producing a substrate having a coating resin layer
- 专利标题(中): 具有涂布树脂层的基板的制造方法和装置
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申请号: US11197494申请日: 2005-08-05
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公开(公告)号: US20060062903A1公开(公告)日: 2006-03-23
- 发明人: Hidenori Shiotsuka , Akiharu Takabayashi , Ichiro Kataoka
- 申请人: Hidenori Shiotsuka , Akiharu Takabayashi , Ichiro Kataoka
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2001-387633 20011220; JP2002-367223 20021218
- 主分类号: B05D5/12
- IPC分类号: B05D5/12
摘要:
A coating apparatus process for producing a coating resin layer on a substrate includes a fastening table for fastening the substrate and a spout for spouting a resin layer precursor onto the substrate.