- 专利标题: Method and system for controlling a velocity field of a supercritical fluid in a processing system
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申请号: US10955326申请日: 2004-09-30
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公开(公告)号: US20060065636A1公开(公告)日: 2006-03-30
- 发明人: Darko Babic
- 申请人: Darko Babic
- 主分类号: B08B6/00
- IPC分类号: B08B6/00 ; C23F1/00
摘要:
A method and system for controlling a velocity field in a processing system is described. In an exemplary embodiment described, the system includes a multi-outlet exhaust manifold having three or more outlets coupled to the processing system adjacent a surface of a substrate to be process. The three or more outlets are located adjacent the substrate in order to provide for a uniform flow of fluid above the surface of the substrate. Additionally, the flow of fluid through the three or more outlets is cyclically and sequentially alternated.
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