发明申请
- 专利标题： MEMS SWITCH WITH SET AND LATCH ELECTRODES
- 专利标题（中）： MEMS开关与套和电极
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申请号： US11234826申请日： 2005-09-23
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公开(公告)号： US20060066937A1公开(公告)日： 2006-03-30
- 发明人: Clarence Chui
- 申请人： Clarence Chui
- 申请人地址： US CA San Francisco 94107
- 专利权人： IDC, LLC
- 当前专利权人： IDC, LLC
- 当前专利权人地址： US CA San Francisco 94107
- 主分类号： G02B26/00
- IPC分类号： G02B26/00
摘要：
Abstract of the DisclosureA MEMS device is electrically actuated with a voltage placed across a first electrode (702) and a moveable material (714). The device may be maintained in an actuated state by latch electrodes (730a, 730b) that are separate from the first electrode.
公开/授权文献
- US07446927B2 MEMS switch with set and latch electrodes 公开/授权日：2008-11-04
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