发明申请
- 专利标题： Systems and methods for amorphous flexures in micro-electro mechanical systems
- 专利标题（中）： 微机电系统中无定形挠曲的系统和方法
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申请号： US10958707申请日： 2004-10-05
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公开(公告)号： US20060072187A1公开(公告)日： 2006-04-06
- 发明人: James McKinnell , Arthur Piehl , James Przybyla
- 申请人： James McKinnell , Arthur Piehl , James Przybyla
- 主分类号： G02F1/00
- IPC分类号： G02F1/00
摘要：
A micro-electro mechanical system includes a flexure, wherein the flexure is made of an amorphous material. Similarly, a method for forming a micro-electro mechanical system includes forming a substrate, and forming an amorphous flexure, the amorphous flexure being coupled to the substrate.
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