发明申请
- 专利标题: Vertical cavity surface emitting laser with undoped top mirror
- 专利标题(中): 垂直腔表面发射激光器与无顶顶镜
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申请号: US11222433申请日: 2005-09-08
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公开(公告)号: US20060072639A1公开(公告)日: 2006-04-06
- 发明人: Ralph Johnson , R. Penner , James Biard
- 申请人: Ralph Johnson , R. Penner , James Biard
- 主分类号: H01S5/00
- IPC分类号: H01S5/00
摘要:
A VCSEL with undoped top mirror. The VCSEL is formed from an epitaxial structure deposited on a substrate. A doped bottom mirror is formed on the substrate. An active layer that includes quantum wells is formed on the bottom mirror. A periodically doped conduction layer is formed on the active layer. The periodically doped conduction layer is heavily doped at locations where the optical energy is at a minimum when the VCSEL is in operation. A current aperture is used between the conduction layer and the active region. An undoped top mirror is formed on the heavily doped conduction layer.
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