发明申请
- 专利标题: Pressure sensor
- 专利标题(中): 压力传感器
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申请号: US11218548申请日: 2005-09-06
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公开(公告)号: US20060075821A1公开(公告)日: 2006-04-13
- 发明人: Kiyoshi Otsuka , Inao Toyoda
- 申请人: Kiyoshi Otsuka , Inao Toyoda
- 专利权人: DENSO CORPORATION
- 当前专利权人: DENSO CORPORATION
- 优先权: JP2004-276771 20040924
- 主分类号: G01L7/08
- IPC分类号: G01L7/08
摘要:
A pressure sensor includes a connector case having a recess, in which a sensor chip is contained and an oil is filled. The recess filled with the oil is sealed by a metal diaphragm. The sensor chip for outputting signals and the circuit chip having a processing circuit for processing the signals from the sensor chip, are stacked. That is, the circuit chip is provided between a bottom wall surface of the recess and the sensor chip. The processing circuit is covered by at least a part of the sensor chip, and the processing circuit of the circuit chip is arranged at a place where the processing circuit can avoid contact with the oil. Because the processing circuit of the circuit chip is not exposed to the oil, the processing circuit can be effectively restricted from being charged due to a polarization of the oil.
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