发明申请
- 专利标题: Method and apparatus for laser drilling
- 专利标题(中): 激光钻孔的方法和装置
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申请号: US11243998申请日: 2005-10-06
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公开(公告)号: US20060076323A1公开(公告)日: 2006-04-13
- 发明人: Kunio Arai , Kazuhisa Ishii
- 申请人: Kunio Arai , Kazuhisa Ishii
- 申请人地址: JP Kamiimaizumi Ebina-shi 243-0488
- 专利权人: Hitachi Via Mechanics, Ltd.
- 当前专利权人: Hitachi Via Mechanics, Ltd.
- 当前专利权人地址: JP Kamiimaizumi Ebina-shi 243-0488
- 优先权: JPJP2001-359425 20011126
- 主分类号: B23K26/38
- IPC分类号: B23K26/38
摘要:
There is provided a laser drilling method that prevents hanging, expansion, or crinkles of copper foil caused when an ultraviolet laser beam that requires no surface roughening is used for a thin double-sided copper-clad film. The drilling method of the copper-clad film comprises the steps of: using an ultraviolet laser as a laser beam; drilling after bonding a resin film to the backside of the film which is the opposite side to the laser-beam-incidence; and delaminating the resin film on the backside after drilling. The resin film bonded to the backside prevents the copper foil from hanging, thus allowing the laser beam to be efficiently applied to the copper foil, and allowing the copper foil to be completely removed by ablation. In the case of a blind hole, the resin film bonded to the backside prevents expansion of the copper foil. Crinkles can be also prevented.
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