发明申请
- 专利标题: Dynamic pressure sensing structure
- 专利标题(中): 动态压力感测结构
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申请号: US11033503申请日: 2005-01-12
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公开(公告)号: US20060078137A1公开(公告)日: 2006-04-13
- 发明人: Mao-Shun Su , Tsung-ter Kuo , Yu-Kon Chou , Yii-Tay Chiou
- 申请人: Mao-Shun Su , Tsung-ter Kuo , Yu-Kon Chou , Yii-Tay Chiou
- 优先权: TW93129944 20041001
- 主分类号: H04R25/00
- IPC分类号: H04R25/00
摘要:
A dynamic pressure sensing structure used in a condenser microphone includes an upper electrode plate, a lower electrode plate, a spacer and a substrate, wherein the upper and lower electrode plates are separated by the spacer and form a resonance cavity with the substrate. The upper electrode plate comprises a flat vibration area and a surrounding flexible area connected thereto. The lower electrode plate comprises a sensible electrode and an actuation electrode surrounding the sensible electrode. The plate is in connection with the flexible area so that a capacitor is formed between the sense area and the flat vibration area. The actuation electrode provides a polarization voltage to generate an electrostatic force, thereby attract the flexible vibration area to curve downwards so that the flat vibration area moves in a flat state and a distance between the flat vibration area and the sensible electrode is varied correspondingly.
公开/授权文献
- US07305096B2 Dynamic pressure sensing structure 公开/授权日:2007-12-04
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