Invention Application
- Patent Title: Electrically erasable programmable read-only memory (EEPROM) device and methods of fabricating the same
-
Application No.: US11242209Application Date: 2005-10-03
-
Publication No.: US20060079045A1Publication Date: 2006-04-13
- Inventor: Jae-Hwang Kim , Seung-Beom Yoon , Kwang-Wook Koh , Chang-Hun Lee , Sung-Ho Kim , Sung-Chul Park , Ju-Ri Kim
- Applicant: Jae-Hwang Kim , Seung-Beom Yoon , Kwang-Wook Koh , Chang-Hun Lee , Sung-Ho Kim , Sung-Chul Park , Ju-Ri Kim
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Priority: KR2004-81861 20041013
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L21/336

Abstract:
An EEPROM device includes a device isolation layer disposed at a predetermined region of a semiconductor substrate to define active regions, a pair of control gates crossing the device isolation layers and an active region, a pair of selection gates interposed between the control gates to cross the device isolation layers and the active region and a floating gate and an intergate dielectric pattern stacked sequentially between the control gates and the active region The EEPROM device further includes a gate insulation layer of a memory transistor interposed between the floating gate and the active region and a tunnel insulation layer thinner than the gate insulation layer of the memory transistor and a gate insulation layer of a selection transistor interposed between the selection gates and the active region. The tunnel insulation layer is aligned at one side adjacent to the floating gate.
Public/Granted literature
- US07432159B2 Electrically erasable programmable read-only memory (EEPROM) device and methods of fabricating the same Public/Granted day:2008-10-07
Information query
IPC分类: