发明申请
- 专利标题: Bonding device and method
- 专利标题(中): 粘合装置和方法
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申请号: US10528690申请日: 2003-09-22
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公开(公告)号: US20060085965A1公开(公告)日: 2006-04-27
- 发明人: Tadatomo Suga , Toshihiro Ito , Akira Yamauchi
- 申请人: Tadatomo Suga , Toshihiro Ito , Akira Yamauchi
- 优先权: JP2002-27686 20020924
- 国际申请: PCT/JP03/12070 WO 20030922
- 主分类号: B23P11/00
- IPC分类号: B23P11/00
摘要:
A device and method for bonding objects to be bonded each having a metal bonding portion on a substrate, comprising cleaning means for exposing the metal bonding portions to a plasma having an energy enough to etch the surfaces of the metal bonding portions at a depth of 1.6 nm or more over the entire surfaces of the metal bonding portions under a reduced pressure and bonding means for bonding the metal bonding portions of the objects taken out of the cleaning means in an atmospheric air. By using a specific scheme, metal bonding portions after the plasma cleaning can be bonded in the atmospheric air, thereby significantly simplifying the bonding process and the whole device and lowering the cost.
公开/授权文献
- US07591293B2 Device for bonding a metal on a surface of a substrate 公开/授权日:2009-09-22