A regenerative refrigeration system includes one or more control devices that utilize micro electro mechanical systems (MEMS) technology. Such MEMS devices may be small in size, on a scale such that it can be introduced into a refrigeration system, such as a cryocooler, without appreciably affecting the size or mass of the refrigeration system. Through the use of MEMS devices, dynamic control of the system may be achieved without need for disassembly of the system or making the system bulky. Suitable regenerative refrigeration systems for use with the MEMS devices include pulse tube coolers, Stirling coolers, and Gifford-McMahon coolers.