- 专利标题: Physical quantity sensor and manufacturing method therefor
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申请号: US11244194申请日: 2005-10-06
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公开(公告)号: US20060087006A1公开(公告)日: 2006-04-27
- 发明人: Kenichi Shirasaka , Hiroshi Saitoh
- 申请人: Kenichi Shirasaka , Hiroshi Saitoh
- 专利权人: Yamaha Corporation
- 当前专利权人: Yamaha Corporation
- 优先权: JPP2004-296371 20041008; JPP2005-045299 20050222; JP2005-089629 20050325; JP2005-094388 20050329
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L21/30
摘要:
A physical quantity sensor includes a pair of physical quantity sensor chips that are inclined with respect to the bottom of an exterior mold package whose side surfaces are each inclined in a thickness direction by an angle ranging from 0° to 5° and are formed in proximity to the outer ends of the physical quantity sensor chips. It is possible to realize the inclination of stages without using molds, wherein absorption devices are used to absorb prescribed portions related to stages, which rotate about axial lines and are thus inclined with respect to a prescribed base. In manufacturing, a thin metal plate having a plurality of lead frames is placed on a base delimited by a clamp; then, intersecting points of intermediate portions formed between the lead frames are subjected to pressing so as to realize the inclination of stages.
公开/授权文献
- US07595548B2 Physical quantity sensor and manufacturing method therefor 公开/授权日:2009-09-29