发明申请
- 专利标题： Opaque chrome coating suitable for etching
- 专利标题（中）： 不透明铬涂层适用于蚀刻
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申请号： US10971611申请日： 2004-10-21
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公开(公告)号： US20060088688A1公开(公告)日： 2006-04-27
- 发明人: Robert Bellman , Ljerka Ukrainczyk
- 申请人： Robert Bellman , Ljerka Ukrainczyk
- 主分类号： B32B3/10
- IPC分类号： B32B3/10
摘要：
A substrate includes an opaque chrome coating on a surface of the substrate dry-etched to form an aperture, wherein chrome in the aperture is below detectable limit. A method of forming an opaque chrome coating on a substrate includes depositing an initial thickness of the opaque chrome coating on the substrate without ion-assist or with undetectable ion-assist and depositing the remainder of the opaque chrome coating with or without ion-assist.
公开/授权文献
- US07459095B2 Opaque chrome coating suitable for etching 公开/授权日：2008-12-02
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