- 专利标题: Scanning electron microscope
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申请号: US11292002申请日: 2005-12-02
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公开(公告)号: US20060097158A1公开(公告)日: 2006-05-11
- 发明人: Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
- 申请人: Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
- 优先权: JP2000-58022 20000229
- 主分类号: G01N23/00
- IPC分类号: G01N23/00
摘要:
An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.
公开/授权文献
- US07439505B2 Scanning electron microscope 公开/授权日:2008-10-21