发明申请
US20060097202A1 Collector having unused region for illumination systems using a wavelength <193 nm
有权
收集器具有使用波长<193nm的照明系统的未使用区域
- 专利标题： Collector having unused region for illumination systems using a wavelength <193 nm
- 专利标题（中）： 收集器具有使用波长<193nm的照明系统的未使用区域
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申请号： US11243403申请日： 2005-10-04
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公开(公告)号： US20060097202A1公开(公告)日： 2006-05-11
- 发明人: Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Jochen Wietzorrek , Frank Melzer , Johannes Wangler
- 申请人： Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Jochen Wietzorrek , Frank Melzer , Johannes Wangler
- 专利权人： CARL ZEISS SMT AG
- 当前专利权人： CARL ZEISS SMT AG
- 优先权： DE10102934 20010123; DE10127298 20010606; DE10138313 20010810
- 主分类号： G01J3/10
- IPC分类号： G01J3/10
摘要：
There is provided a collector for illumination systems for light having a wavelength ≦193 nm comprising. The collector includes (a) a first mirror shell adjacent to, and positioned inside of, a second mirror shell around a common axis of rotation, in which the first and second mirror shells are rotationally symmetric, and (b) a component in a region between the first and second mirror shells. The collector is for receiving the light from a light source via an object-side aperture and for illuminating an area in an image-side plane, and the region is not used by the light.
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