发明申请
- 专利标题: Sputtering target and process for producing the same
- 专利标题(中): 溅射目标和生产方法
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申请号: US10547816申请日: 2004-02-03
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公开(公告)号: US20060099126A1公开(公告)日: 2006-05-11
- 发明人: Hideo Hosono , Kazushige Ueda , Masataka Yahagi , Hideo Takami
- 申请人: Hideo Hosono , Kazushige Ueda , Masataka Yahagi , Hideo Takami
- 申请人地址: JP Tokyo 105-0001
- 专利权人: Nikko Materials Co., Ltd.
- 当前专利权人: Nikko Materials Co., Ltd.
- 当前专利权人地址: JP Tokyo 105-0001
- 优先权: JP2003-56811 20030304
- 国际申请: PCT/JP04/01049 WO 20040203
- 主分类号: C01F17/00
- IPC分类号: C01F17/00 ; B22D7/00
摘要:
A manufacturing method of a sputtering target having mainly oxychalcogenide containing La and Cu by sintering at least one or more powders selected from an elementary substance of a constituent element, oxide or chalcogenide as the raw material, characterized in including a reaction step of retaining the [material] at a temperature of 850° C. or less for 1 hour or more during the sintering step, wherein this [material], after the reaction step, is subject to pressure sintering at a temperature that is higher than the reaction step temperature. In addition to increasing the density of a P-type transparent conductive material target having mainly oxychalcogenide containing La and Cu and enabling the enlargement of the target at a low manufacturing cost, the existence of unreacted matter in the target can be eliminated, the production yield can be improved by suppressing the generation of cracks in the target, and the quality of deposition formed by sputtering this kind of target can also be improved.
公开/授权文献
- US07344660B2 Sputtering target and process for producing the same 公开/授权日:2008-03-18
信息查询
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