发明申请
- 专利标题: Pattern forming method and pattern forming apparatus
- 专利标题(中): 图案形成方法和图案形成装置
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申请号: US11222736申请日: 2005-09-12
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公开(公告)号: US20060099535A1公开(公告)日: 2006-05-11
- 发明人: Manabu Yabe
- 申请人: Manabu Yabe
- 专利权人: DAINIPPON SCREEN MFG. CO., LTD.
- 当前专利权人: DAINIPPON SCREEN MFG. CO., LTD.
- 优先权: JPP2004-326153 20041110
- 主分类号: B05D5/00
- IPC分类号: B05D5/00 ; B05C5/00 ; G03C5/00
摘要:
A pattern forming apparatus (1) comprises an ejection part (41) for ejecting a patterning material to a main surface of a substrate (9) from a plurality of outlets. The ejection part (41) moves relative to the substrate (9) in a direction along the main surface of the substrate (9) by a stage moving mechanism (2) and a plurality of linear pattern elements are formed on the substrate (9). In forming the linear pattern elements, moving speed of the plurality of outlets relative to the substrate (9) is changed periodically by an outlets moving mechanism (44) and gnarl portions each of which spreads in a direction perpendicular to a direction extending the linear pattern elements (91) are formed in each linear pattern element (91). This makes it possible to form a pattern similar to parallel crosses on the substrate 9 appropriately while ejecting the patterning material from the plurality of outlets.
公开/授权文献
- US2085716A Filling feeler mechanism 公开/授权日:1937-06-29
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