发明申请
- 专利标题: METHOD AND STRUCTURE TO WIRE ELECTRONIC DEVICES
- 专利标题(中): 电子设备的方法和结构
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申请号: US10904439申请日: 2004-11-10
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公开(公告)号: US20060099801A1公开(公告)日: 2006-05-11
- 发明人: Michael Cranmer , Michael Domitrovits , Benjamin Fasano , Harvey Hamel , Charles Ryan
- 申请人: Michael Cranmer , Michael Domitrovits , Benjamin Fasano , Harvey Hamel , Charles Ryan
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L21/4763
- IPC分类号: H01L21/4763
摘要:
An integrated circuit structure and a method of manufacturing, wherein the method comprises forming a first via in an interconnect layer of the substrate, wherein the first via comprises a first size diameter; and forming a second via in the interconnect layer, wherein the second via comprises a second size diameter, the second size diameter being dimensioned larger than the first size diameter, wherein the second via comprises a non-uniform circumference, and wherein the substrate is configured in an approximately 1:1 ratio (i.e., approximately equal number) of the first and second vias. The first and second vias are laser formed or are formed by any of mechanical punching and photolithography. The second via is formed by sequentially forming multiple partially overlapping vias dimensioned and configured with the first size diameter. The first and second vias are arranged in a grid to allow for wiring of electronic devices.
公开/授权文献
- US07088000B2 Method and structure to wire electronic devices 公开/授权日:2006-08-08
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