发明申请
- 专利标题: Method of fabricating ridge type waveguide integrated semiconductor optical device
- 专利标题(中): 脊型波导集成半导体光器件的制造方法
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申请号: US11122998申请日: 2005-05-06
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公开(公告)号: US20060104583A1公开(公告)日: 2006-05-18
- 发明人: Jong Kim , Hyun Kim , Kang Kim , Oh Kwon , Eun Sim , Kwang Oh
- 申请人: Jong Kim , Hyun Kim , Kang Kim , Oh Kwon , Eun Sim , Kwang Oh
- 专利权人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 当前专利权人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 优先权: KR2004-94581 20041118
- 主分类号: G02B6/10
- IPC分类号: G02B6/10
摘要:
Provided is a method of fabricating a ridge type waveguide integrated semiconductor optical device. The method includes: separating a substrate into an active waveguide region and a passive waveguide region and selectively epitaxial-growing an active layer and a passive layer in the active waveguide region and the passive waveguide region, respectively, such that the active layer and the passive layer are vertically aligned with each other; sequentially forming a capping layer and an electrode connection layer on the active layer and the passive layer; forming a first insulating layer pattern on a predetermined region of the electrode connection layer disposed in the active waveguide region and simultaneously, forming a second insulating layer pattern on a predetermined region of the electrode connection layer disposed in the passive waveguide region; forming a shallow ridge type active waveguide and a shallow ridge type passive waveguide by performing an etching process using the first and second insulating layer patterns as etch masks until the capping layer is etched to a predetermined depth; and forming a passivation pattern on the entire surface of the shallow ridge type active waveguide and forming a deep ridge type passive waveguide by performing an etching process using the second insulating layer pattern as an etch mask until the substrate is etched to a predetermined depth.
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