Invention Application
- Patent Title: Autofocus for high power laser diode based annealing system
- Patent Title (中): 基于大功率激光二极管的退火系统的自动对焦
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Application No.: US11198660Application Date: 2005-08-05
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Publication No.: US20060105585A1Publication Date: 2006-05-18
- Inventor: Dean Jennings , Timothy Thomas
- Applicant: Dean Jennings , Timothy Thomas
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Main IPC: H01L21/324
- IPC: H01L21/324 ; H01L21/26 ; H01L21/42 ; H01L21/477
Abstract:
Apparatus for thermally processing a substrate includes a source of laser radiation comprising a plurality diode lasers arranged along a slow axis, optics directing the laser radiation from the source to the substrate, and an array of photodetectors arranged along a fast axis perpendicular to the slow axis and receiving portions of the laser radiation reflected from the substrate through the optics.
Public/Granted literature
- US07910499B2 Autofocus for high power laser diode based annealing system Public/Granted day:2011-03-22
Information query
IPC分类:
