发明申请
- 专利标题: Lithographic apparatus and device manufacturing method
- 专利标题(中): 平版印刷设备和器件制造方法
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申请号: US10995525申请日: 2004-11-24
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公开(公告)号: US20060109436A1公开(公告)日: 2006-05-25
- 发明人: Hans Van Der Laan , Manfred Suddendorf
- 申请人: Hans Van Der Laan , Manfred Suddendorf
- 申请人地址: NL Veldhoven
- 专利权人: ASML NETHERLANDS B.V.
- 当前专利权人: ASML NETHERLANDS B.V.
- 当前专利权人地址: NL Veldhoven
- 主分类号: G03B27/68
- IPC分类号: G03B27/68
摘要:
A lithographic apparatus includes an illumination system configured to provide a beam of radiation of radiation; a support configured to support a patterning device configured to impart a pattern to the beam of radiation; a substrate table configured to hold a substrate; a projection system configured to project the patterned beam onto a target portion of the substrate, the projection system and/or illumination system including a focusing element; a plurality of stop discs each having an aperture therethrough different from the size and/or shape of the apertures of the other stop discs; and a mechanism configured to exchangeably place a selected one of the stop discs adjacent to the focusing element.
公开/授权文献
- US07274434B2 Lithographic apparatus and device manufacturing method 公开/授权日:2007-09-25