发明申请
- 专利标题: Copper foil inspection device copper foil inspection method defect inspection device and defeat inspection method
- 专利标题(中): 铜箔检测装置铜箔检验方法缺陷检查装置和失败检查方法
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申请号: US10498695申请日: 2002-12-12
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公开(公告)号: US20060109466A1公开(公告)日: 2006-05-25
- 发明人: Qing Zhou , Jun Fujiwara , Koji Yamabe , Ayumu Inoue
- 申请人: Qing Zhou , Jun Fujiwara , Koji Yamabe , Ayumu Inoue
- 优先权: JP2001-380380 20011213
- 国际申请: PCT/JP02/13000 WO 20021212
- 主分类号: G01N21/84
- IPC分类号: G01N21/84
摘要:
A surface of copper foil wound onto a guide roller 26 is irradiated with light. Specular light from the copper foil surface is received by CCD cameras 14a, and scattered light from the copper foil surface is received by CCD cameras 14b. When, in a region in which the amount of specular light received by the CCD cameras 14a is equal to or larger than a first threshold, a portion having a luminance equal to or larger than a second threshold is present, and when the amount of scattered light received by the CCD cameras 14b is smaller than a luminance average, that region is determined to be a defective copper portion.
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