发明申请
US20060109466A1 Copper foil inspection device copper foil inspection method defect inspection device and defeat inspection method 失效
铜箔检测装置铜箔检验方法缺陷检查装置和失败检查方法

  • 专利标题: Copper foil inspection device copper foil inspection method defect inspection device and defeat inspection method
  • 专利标题(中): 铜箔检测装置铜箔检验方法缺陷检查装置和失败检查方法
  • 申请号: US10498695
    申请日: 2002-12-12
  • 公开(公告)号: US20060109466A1
    公开(公告)日: 2006-05-25
  • 发明人: Qing ZhouJun FujiwaraKoji YamabeAyumu Inoue
  • 申请人: Qing ZhouJun FujiwaraKoji YamabeAyumu Inoue
  • 优先权: JP2001-380380 20011213
  • 国际申请: PCT/JP02/13000 WO 20021212
  • 主分类号: G01N21/84
  • IPC分类号: G01N21/84
Copper foil inspection device copper foil inspection method defect inspection device and defeat inspection method
摘要:
A surface of copper foil wound onto a guide roller 26 is irradiated with light. Specular light from the copper foil surface is received by CCD cameras 14a, and scattered light from the copper foil surface is received by CCD cameras 14b. When, in a region in which the amount of specular light received by the CCD cameras 14a is equal to or larger than a first threshold, a portion having a luminance equal to or larger than a second threshold is present, and when the amount of scattered light received by the CCD cameras 14b is smaller than a luminance average, that region is determined to be a defective copper portion.
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