发明申请
- 专利标题: Semiconductor memory device
- 专利标题(中): 半导体存储器件
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申请号: US11289441申请日: 2005-11-30
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公开(公告)号: US20060113581A1公开(公告)日: 2006-06-01
- 发明人: Takashi Miki , Hiroshige Hirano
- 申请人: Takashi Miki , Hiroshige Hirano
- 优先权: JP2004-345085 20041130
- 主分类号: H01L29/94
- IPC分类号: H01L29/94
摘要:
A semiconductor memory device having a memory cell array in which plural memory transistors and plural memory call capacitors, which are components of memory cells, are arranged, comprises a first wiring layer formed on the memory cell array, and a second wiring layer formed above the first wiring layer, wherein a wiring density of the first wiring layer on the memory cell array is higher than a wiring density of the second wiring layer on the memory cell array. Therefore, a hydrogen barrier property for the capacitors is improved, and an adverse effect due to stress applied to the capacitors is reduced, thereby suppressing deterioration of capacitor characteristics.
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