发明申请
- 专利标题: Transistor of semiconductor device and method of fabricating the same
- 专利标题(中): 半导体器件的晶体管及其制造方法
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申请号: US11280608申请日: 2005-11-15
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公开(公告)号: US20060124963A1公开(公告)日: 2006-06-15
- 发明人: Jae Mun , Hung Ji , Ho Ahn , Hae Kim
- 申请人: Jae Mun , Hung Ji , Ho Ahn , Hae Kim
- 优先权: KR2004-105769 20041214; KR2005-61301 20050707
- 主分类号: H01L29/739
- IPC分类号: H01L29/739
摘要:
Provided are a transistor of a semiconductor device and a method of fabricating the same. The transistor of a semiconductor device includes an epitaxial substrate having a buffer layer, a first silicon (Si) planar doped layer, a first conductive layer, a second Si planar doped layer having a different dopant concentration from the first Si planar doped layer, and a second conductive layer, which are sequentially formed on a semi-insulating substrate; a source electrode and a drain electrode formed on both sides of the second conductive layer to penetrate the first Si planar doped layer to a predetermined depth to form an ohmic contact; and a gate electrode formed on the second conductive layer between the source electrode and the drain electrode to form a contact with the second conductive layer, wherein the gate electrode, the source electrode and the drain electrode are electrically insulated by an insulating layer, and a predetermined part of an upper part of the gate electrode is formed to overlap at least one of the source electrode and the drain electrode. Therefore, a maximum voltage that can be applied to the switching device is increased due to increases of a gate turn-on voltage and a breakdown voltage, and decrease of a parallel conduction component. As a result of this improved power handling capability, high-power and low-distortion characteristics and high isolation can be expected from the switching device.
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