发明申请
US20060126157A1 Monolithic integrated semiconductor modulator-SOA-LED broad band light source and method of fabricating the same
审中-公开
单片集成半导体调制器 - SOA-LED宽带光源及其制造方法
- 专利标题: Monolithic integrated semiconductor modulator-SOA-LED broad band light source and method of fabricating the same
- 专利标题(中): 单片集成半导体调制器 - SOA-LED宽带光源及其制造方法
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申请号: US11298387申请日: 2005-12-08
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公开(公告)号: US20060126157A1公开(公告)日: 2006-06-15
- 发明人: Moon Park , Sahang Park , Su Oh , Sung Kim , Kwang Oh , Yong Baek , Gyung Kim
- 申请人: Moon Park , Sahang Park , Su Oh , Sung Kim , Kwang Oh , Yong Baek , Gyung Kim
- 专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人: Electronics and Telecommunications Research Institute
- 优先权: KR10-2004-0105428 20041214; KR10-2005-0064178 20050715
- 主分类号: H01S3/00
- IPC分类号: H01S3/00
摘要:
Provided is a monolithic integrated semiconductor broad band light source. In the monolithic integrated semiconductor broad band light source, an electro absorption modulator, a semiconductor optical amplifier, and a light emitting diode are integrated on an InP substrate. Ions are implanted among the electro absorption modulator, the semiconductor optical amplifier, and the light emitting diode to electrically insulate the electro absorption modulator, the semiconductor optical amplifier, and the light emitting diode from one another. Electrodes independently implant currents into the electro absorption modulator, the semiconductor optical amplifier, and the light emitting diode. In particular, it is important to form a current intercepting layer and electrically insulate electrodes from one another but optically connect the electrodes in terms of performance of the monolithic integrated semiconductor broad band light source. The semiconductor optical amplifier and the light emitting diode are integrated into an active layer. As a result, broad band light generated from the light emitting diode is amplified by the semiconductor optical amplifier and modulated by a modulator so as to fabricate a monolithic broad band light source.