发明申请
- 专利标题: Semiconductor device and manufacturing method therefor
- 专利标题(中): 半导体装置及其制造方法
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申请号: US11282600申请日: 2005-11-21
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公开(公告)号: US20060131745A1公开(公告)日: 2006-06-22
- 发明人: Naoki Yutani
- 申请人: Naoki Yutani
- 申请人地址: JP Chiyoda-ku
- 专利权人: MITSUBISHI DENKI KABUSHIKI KAISHA
- 当前专利权人: MITSUBISHI DENKI KABUSHIKI KAISHA
- 当前专利权人地址: JP Chiyoda-ku
- 优先权: JP2004-361477 20041214
- 主分类号: H01L23/48
- IPC分类号: H01L23/48
摘要:
A semiconductor device is obtained, in which excellent characteristics are achieved, the reliability is improved, and an SiC wafer can also be used for the fabrication. A plurality of Schottky-barrier-diode units 10 is formed on an SiC chip 9, and each of the units 10 has an external output electrode 4 independently of each other. Bumps 11 (the diameter is from several tens to several hundreds of μm) are formed only on the external output electrodes 4 of non-defective units among the units 10 formed on the SiC chip 9, meanwhile bumps are not formed on the external output electrodes 4 of defective units in which the withstand voltage is too low, or the leakage current is too much. Because the bumps are not formed on the defective units, Schottky-barrier-side electrodes 3 are connected in parallel to the exterior of the device through the bumps 11, and a wiring layer 13 and an external lead 13a of a wiring substrate 12; thus, only the external output electrodes 4 of the non-defective units 10 are connected in parallel with each other.
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