发明申请
- 专利标题: MEMS switch and method of fabricating the same
- 专利标题(中): MEMS开关及其制造方法
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申请号: US11258196申请日: 2005-10-26
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公开(公告)号: US20060132891A1公开(公告)日: 2006-06-22
- 发明人: Che-heung Kim , Hyung-jae Shin , Soon-cheol Kweon , Kyu-sik Kim , Sang-hun Lee
- 申请人: Che-heung Kim , Hyung-jae Shin , Soon-cheol Kweon , Kyu-sik Kim , Sang-hun Lee
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 优先权: KR2004-107858 20041217
- 主分类号: G02B26/00
- IPC分类号: G02B26/00
摘要:
A micro electro mechanical system switch and a method of fabricating the same. The micro electro mechanical system switch includes a substrate a plurality of signal lines formed at sides an upper surface of the substrate and including switching contact points and a plurality of immovable electrodes on the upper surface of the substrate and between the plurality of signal lines. An inner actuating member performs a seesaw based on a center of the substrate and together with an outer actuating member. Pushing rods are formed at ends of an upper surface of the inner actuating member with ends protruding from and overlapping with an upper portion of the outer actuating member. Contacting members are formed on a lower surface of the outer actuating member so as to be pushed by the pushing rods and contacting the switching contact points of the signal lines.
公开/授权文献
- US07251069B2 MEMS switch and method of fabricating the same 公开/授权日:2007-07-31